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research article

Development of a Hybrid MEMS BLDC Micromotor

Merzaghi, S.  
•
Koechli, C.  
•
Perriard, Y.  
2011
IEEE Transactions on Industry Applications

This paper addresses the design of a new hybrid microelectromechanical systems (MEMS) micromotor. It is a small three-phase axial flux brushless dc (BLDC) motor. The stator is developed following the almost-standard CMOS technology rules used for MEMS manufacturing, and the coils have two copper layers. The rotor is made of a ring permanent magnet assembled over the stator chip. The stator design has been performed using an analytical model also presented in this paper. The microfabrication of the first prototypes is presented, followed by their characterization. With an efficiency of about 42% for an input power of 310 nW, this MEMS micromotor has very good performance and demonstrates the potential of electromagnetic systems at this scale.

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Type
research article
DOI
10.1109/TIA.2010.2090841
Web of Science ID

WOS:000286385300001

Author(s)
Merzaghi, S.  
Koechli, C.  
Perriard, Y.  
Date Issued

2011

Publisher

Institute of Electrical and Electronics Engineers

Published in
IEEE Transactions on Industry Applications
Volume

47

Issue

1

Start page

3

End page

11

Subjects

Brushless motors

•

Microelectromechanical devices

•

Microelectromechanical systems (MEMS)

•

Micromotors

•

Permanent-magnet motors

•

Optimization

•

Motor

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LAI  
Available on Infoscience
November 30, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/59297
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