Modeling and design of a hybrid MEMS motor

This paper addresses the design of a new hybrid MEMS micromotor. It gives insights on the choices, which led to the fabrication of a small 3-phases axial flux BLDC motor. The stator is developed following the almost CMOS technology rules used for MEMS manufacturing and the coils have two copper layers. The rotor is made of a ring permanent magnet assembled over the stator chip. The stator design has been performed using an analytical model presented in the paper and validated using finite elements and measurements on the prototype.


Published in:
Proceedings of the 19th International Conference on Electrical Machines (ICEM)
Presented at:
19th International Conference on Electrical Machines (ICEM), Rome, Italy, September 6-8, 2010
Year:
2010
Publisher:
IEEE, Piscataway, NJ, USA
ISBN:
978-1-4244-4174-7
Keywords:
Laboratories:




 Record created 2010-11-30, last modified 2018-09-13


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