A new method for fabricating analog Light modulators on VLSI devices is described. The process is fully compatible with devices fabricated by commercial VLSI foundries, and the assembly of the modulator structures requires a small number of simple processing steps. The modulators are capable of analog amplitude or phase modulation and can operate at video rates and at low voltages (2.2 V). The modulation mechanism and the process yielding the modulator structures are described. Experimental data are presented. (C) 1995 Optical Society of America