Liquid crystal on silicon beam deflector

Psaltis, D.; Wang, X.

Liquid crystal on silicon beam deflector

A high efficiency, low cost, low voltage operation liquid crystal on silicon (LCOS) beam steering device with multiple angles addressing capability is developed. Currently, seven steering angles with as high as 92.7% efficiency are achieved within 2.85v. The device's design consideration, fabrication process as well as the characterization results are described.

Published in:

Diffractive And Holographic Technologies, Systems, And Spatial Light Modulators Vi, 3633, 160-169

Presented at:

Conference on Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, SAN JOSE, CA, Jan 27-29, 1999

Year:

1999

Publisher:

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa

Keywords:

beam deflector ; liquid crystal on silicon(LCOS) ; beam steering ; diffractive optics

Other identifiers:

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