Liquid crystal on silicon beam deflector

• Presented at: Conference on Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, SAN JOSE, CA, Jan 27-29, 1999
• Published in: Diffractive And Holographic Technologies, Systems, And Spatial Light Modulators Vi, vol. 3633, p. 160-169
• Series: Proceedings Of The Society Of Photo-Optical Instrumentation Engineers (Spie)
• Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa, 1999

A high efficiency, low cost, low voltage operation liquid crystal on silicon (LCOS) beam steering device with multiple angles addressing capability is developed. Currently, seven steering angles with as high as 92.7% efficiency are achieved within 2.85v. The device's design consideration, fabrication process as well as the characterization results are described.

Keywords: beam deflector ; liquid crystal on silicon(LCOS) ; beam steering ; diffractive optics

Reference

• EPFL-CONF-158424
• View record in Web of Science

Record created on 2010-11-25, modified on 2017-05-10