Conference paper

Deformable Silicon Membrane for Dynamic Linear Laser Beam Diffuser

We present a dynamic laser beam shaper based on MEMS technology. We show a prototype of a dynamic diffuser made of single crystal silicon. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension. Resonance frequencies of the membrane can range from 1 kHz to 20 kHz. Mode shapes of the deformable mirror are excited using magnetic actuation. Diffusing angle can be tuned by adjusting the driving current in the membrane. We measured a diffusing angle of 1 degrees for an applied current of 40 mA. The aluminum coated mirror can handle 140 W/cm(2) of visible to infrared optical power. Application to smooth out interference pattern generated by a static diffuser is shown.


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