Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Equivalent Circuit for RF Flexural Free-Free MEMS Resonators
 
research article

Equivalent Circuit for RF Flexural Free-Free MEMS Resonators

Mastrangeli, M.  
•
Nannini, A.
•
Paci, D.
Show more
2006
Journal of Computational Electronics

A method to extract a lumped-parameter equivalent circuit for a free-free flexural MEMS resonator, based on the Euler-Bernoulli beam equation and exploiting a modal analysis approach, is presented. The dynamic behaviour predicted by the equivalent circuit is compared with FEM simulations, and the effect of a geometrical mismatch is investigated as well. The resonance frequency and the quality factor are correctly predicted. The method could be used for more complex systems of interconnected beams. The circuit can be used as a quick and intuitive analysis tool for the system-level designer and to allow the simulation of the device in a system-level design environment.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

Mastrangeli et al. - JCE2006.pdf

Type

Publisher's Version

Version

Published version

Access type

openaccess

Size

332.43 KB

Format

Adobe PDF

Checksum (MD5)

09662573132b932a381e89dbe49c8c96

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés