Integration of MOSFET Transistors in MEMS Resonators for Improved Output Detection


Published in:
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 1709-1712
Presented at:
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Lyon, France, 10-14 06 2007
Year:
2007
Publisher:
IEEE
Laboratories:




 Record created 2010-11-08, last modified 2018-09-13


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