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research article

Dipole antenna and distributed MEMS phase shifter fully integrated in a single wafer process for beam steering applications

Fernández-Bolaños, M.
•
Vasylchenko, A.
•
Dainesi, P.  
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2010
Microelectronic Engineering

This paper reports on the design and fabrication of a fully integrated antenna beam steering concept for airborne applications at 17 GHz. The system is based on a single wafer process including a dipole antenna, a balun and a 2-bit distributed MEMS phase shifter (in a 7 x 3 mm high-resistivity-silicon dice). To our knowledge, it is the first time that such integration has been done. First results of individual devices are reported and simulations of the whole concept are originally presented. (C) 2009 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.mee.2009.10.009
Web of Science ID

WOS:000276300700154

Author(s)
Fernández-Bolaños, M.
Vasylchenko, A.
Dainesi, P.  
Brebels, S.
De Raedt, W.
Vandenbosch, G. A. E.
Ionescu, A. M.  
Date Issued

2010

Publisher

Elsevier

Published in
Microelectronic Engineering
Volume

87

Issue

5-8

Start page

1290

End page

1293

Subjects

Distributed MEMS phase shifter

•

Dipole antenna

•

Beam steering

•

Wafer integration

•

Switches

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

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NANOLAB  
Available on Infoscience
November 8, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/57237
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