Microelectromechanical Metal-Air-Insulator-Semiconductor (MEM-MAIS) Diode: A Novel Hybrid Device for ESD Protection
2009
Details
Title
Microelectromechanical Metal-Air-Insulator-Semiconductor (MEM-MAIS) Diode: A Novel Hybrid Device for ESD Protection
Author(s)
Acquaviva, D. ; Tsamados, D. ; Coronel, Ph. ; Skotnicki, T. ; Ionescu, A. M.
Published in
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
Pages
132-135
Conference
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, 25-29 01 2009
Date
2009
Publisher
IEEE
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2010-11-08