Microelectromechanical Metal-Air-Insulator-Semiconductor (MEM-MAIS) Diode: A Novel Hybrid Device for ESD Protection


Published in:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, 132-135
Presented at:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, 25-29 01 2009
Year:
2009
Publisher:
IEEE
Laboratories:




 Record created 2010-11-08, last modified 2018-03-17


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