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research article
Automated wafer-scale fabrication of electron beam deposited tips for atomic force microscopes using pattern recognition
2004
We present an automation technique for the growth of electron beam deposited tips on whole wafers of atomic force microscope cantilevers. This technique uses pattern recognition on scanning electron microscope images of successive magnifications to precisely place the tips on the cantilevers. We demonstrate the capabilities of the working system on a four-inch wafer of microfabricated small cantilevers with a total of approximately 2100 levers per week.
Type
research article
Web of Science ID
WOS:000224022800005
Authors
Publication date
2004
Published in
Volume
15
Issue
9
Start page
1131
End page
1134
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
November 5, 2010
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