Design and modeling of a high-speed scanner for atomic force microscopy

A new scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The lowest resonance frequency of this scanner is above 22 kHz. The X and Y scan ranges are 13 micrometers and the Z range is 4.3 micrometers. The focus of this contribution is on the vertical positioning direction of the scanner, being the crucial axis of motion with the highest bandwidth and precision requirements for gentle imaging with the atomic force microscope. A mathematical model of the scanner dynamics is presented that will enable more accurate topography measurements with the high-speed AFM system.


Published in:
2006 American Control Conference, Vols 1-12, 1-12, 502-507
Year:
2006
ISSN:
0743-1619
Note:
Times Cited: 0
American Control Conference 2006
JUN 14-16, 2006
Minneapolis, MN
Laboratories:




 Record created 2010-11-05, last modified 2018-03-16


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