Scanning probe microscope for imaging material e.g. metal, has strain gauge coupled to opposed actuators arranged in opposed push or push-pull configuration to measure differential motion of opposed actuators

NOVELTY - The microscope (11) has a set of four actuators (14, 16, 18, 20) i.e. piezoelectric actuators, and a strain gauge coupled to two opposed actuators (14, 18), arranged in opposed push or push-pull configuration to measure the differential motion of the opposed actuators. A scanner (10) i.e. two dimension scanner, includes a flexure and bearing ball that is coupled to cross-conformed actuators (14, 16) arranged along x and y axes. A sample supporting member is provided in a center of a support frame of the scanner, where the flexure is formed of blade springs. USE - Scanning probe microscope for imaging a wide range of materials e.g. metal, semiconductor, mineral, polymer and biomaterial, and for measuring deflection of a cantilever. ADVANTAGE - The microscope reduces the mechanical oscillations while imaging by providing a rigid design with high order resonance frequencies. The microscope avoids the low resonance frequencies and accounts for piezo nonlinearities. The two piezoelectric actuators are identical over long range of temperature, and the absolute temperature change does not change the output of the bridge. The output of the full bridge signal gets doubled, thus increasing the sensitivity and improving the signal to noise ratio.


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    • EPFL-PATENT-154176

    Record created on 2010-11-05, modified on 2017-05-10


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