Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor

We present the design, modeling and characterization of a 3-phase electrostatic rotary stepper micromotor. The proposed motor is a monolithic device fabricated using silicon-on-insulator (SOI) technology. The rotor is suspended with a frictionless flexural pivot bearing and reaches an unprecedented rotational range of 30° (+/- 15°) at 65 V. We have established a mechanical model of the deformation structure and performed finite element analysis (FEA) simulations of the dynamic properties. These studies are consistent with the extensive experimental characterization performed in the quasi-static, transient, and dynamic regimes.


Published in:
Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems , 1257-1260
Presented at:
24th Int. Conf. on Micro Electro Mechanical Systems, Cancun, Mexico, January 23-27, 2011
Year:
2011
Publisher:
IEEE
Keywords:
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 Record created 2010-10-23, last modified 2018-03-17

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