Couche épaisse de nitrure de Gallium ou de nitrure mixte de Gallium et d'un autre métal, procédé de préparation, et dispositif électronique ou optoélectronique comprenant une telle couche
The invention concerns a monocrystalline coating crack-free coating of gallium nitride or mixed gallium nitride and another metal, on a substrate likely to cause extensive stresses in the coating, said substrate being coated with a buffer layer, wherein: at least a monocrystalline layer of a material having a thickness ranging between 100 and 300 nm, preferably between 200 and 250 nm, and whereof crystal lattice parameter is less than the crystal lattice parameter of the gallium nitride or of the mixed gallium nitride with another metal, is inserted in the coating of gallium nitride or mixed gallium nitride with another metal. The invention also concerns the method for preparing said coating. The invention further concerns electronic and optoelectronic devices comprising said coating.
8851146
Brevet déposé sous n. EP1290721, US2003136333, JP2003536257 + PCT
Alternative title(s) : (de) Verfahren zur herstellung einer galliumnitrid-schicht (fr) Procede de preparation d'une couche de nitrure de gallium (en) Method of forming a gallium nitride layer
Patent number | Country code | Kind code | Date issued |
EP1290721 | EP | B1 | 2015-01-21 |
JP5378634 | JP | B2 | 2013-12-25 |
CN101241883 | CN | B | 2012-03-21 |
US7776154 | US | B2 | 2010-08-17 |
US7767307 | US | B2 | 2010-08-03 |
CA2411606 | CA | C | 2010-03-16 |
KR100897589 | KR | B1 | 2009-05-14 |
CN101241883 | CN | A | 2008-08-13 |
US2008185611 | US | A2 | 2008-08-07 |
US2008188065 | US | A2 | 2008-08-07 |
CN100380588 | CN | C | 2008-04-09 |
US2008048207 | US | A1 | 2008-02-28 |
US2008050894 | US | A1 | 2008-02-28 |
US7273664 | US | B2 | 2007-09-25 |
FR2810159 | FR | B1 | 2005-04-08 |
JP2003536257 | JP | A | 2003-12-02 |
CN1436365 | CN | A | 2003-08-13 |
US2003136333 | US | A1 | 2003-07-24 |
EP1290721 | EP | A1 | 2003-03-12 |
KR20030007896 | KR | A | 2003-01-23 |
AU6613101 | AU | A | 2001-12-17 |
FR2810159 | FR | A1 | 2001-12-14 |
CA2411606 | CA | A1 | 2001-12-13 |
WO0195380 | WO | A1 | 2001-12-13 |