Crack-free highly reflective AlInN/AlGaN bragg mirrors for UV applications
We report the growth of highly reflective distributed Bragg reflectors (DBRs) in the UV region using the Al0.85In0.15N/Al0.2Ga0.8N lattice-matched system. The DBRs were deposited on nearly strain-free Al0.2Ga0.8N templates to avoid strain-induced structural degradations. The appearance of cracks was then completely suppressed. The DBRs exhibit a reflectivity higher than 99% at a wavelength as short as similar to 340 nm and a stop band width of 215 meV (20 nm). (c) 2006 American Institute of Physics.
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Feltin, E., Carlin, J. F., Dorsaz, J., Christmann, G., Butte, R., Laugt, M., Ilegems, M., & Grandjean, N. (2006). Crack-free highly reflective AlInN/AlGaN bragg mirrors for UV applications. Applied Physics Letters, 88(5), Article 1108. https://doi.org/10.1063/1.2167399
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WOS:000235136700008
2006
88
5
1108
REVIEWED
EPFL