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research article
Extension of the layer-by-layer growth regime of InxGa1-xAs on GaAs (001)
In order to delay the occurrence of the 2D-3D growth mode transition in highly strained InxGa1-xAs epitaxial layers grown on GaAs (001) by molecular beam epitaxy, the mass transport at the surface should be reduced. This can be achieved by increasing the growth rate. It is demonstrated in this letter that this is an efficient way to increase the critical thickness for which the 3D growth appears.
Type
research article
Authors
Publication date
1993
Published in
Volume
8
Issue
11
Start page
2031
End page
2034
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 5, 2010
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