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research article
SURFACTANT MEDIATED EPITAXIAL-GROWTH OF INXGA1-XAS ON GAAS (001)
It is shown that Te can be used as a surfactant for the growth of highly strained InxGa1-xAs on GaAs(001). As observed by reflection high-energy electron diffraction analysis during growth, adsorption of Te on the GaAs surface prior to the growth of InxGa1-xAs drastically increases the layer thickness which can be grown in a two-dimensional layer-by-layer fashion. In analogy with the behavior of As and Sb as surfactant in the growth of Si/Ge [Copel, Reuter, Kaxiras, and Tromp, Phys. Rev. Lett. 63, 632 (1989)] Te is only slightly incorporated in the growing layer and floats at the surface.
Type
research article
Authors
Publication date
1992
Published in
Volume
61
Issue
1
Start page
99
End page
101
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 5, 2010
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