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Wafer-Scale Fabrication of Thin SiN Membranes and Au Films and Membranes with Arrays of Sub-um Holes Using Nanosphere Lithography
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Wafer-Scale Fabrication of Thin SiN Membranes and [...]
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Klein, Mona Julia Katharina
- 4883
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EPFL_TH4883
version 1
EPFL_TH4883.pdf
[31.83 MB]
27 Jan 2018, 13:51
Texte intégral / Full text
Texte intégral / Full text