High-density, high-aspect ratio epoxy microstructures by Direct Write Laser Patterning
2010
Details
Title
High-density, high-aspect ratio epoxy microstructures by Direct Write Laser Patterning
Author(s)
Cadarso, Victor Javier ; Pfeiffer, Karl ; Ostrzinski, Ute ; Bureau, Jean-Baptiste ; Racine, Georges-André ; Voigt, Ana ; Auzelyte, Vaida ; Gruetzner, Gabi ; Brugger, Jürgen
Published in
36th International Conference on Micro & Nano Engineering (MNE)
Conference
36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010
Date
2010
Additional link
URL
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Scientific production and competences > STI - School of Engineering > CMI - Center of MicroNanoTechnology
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Scientific production and competences > STI - School of Engineering > CMI - Center of MicroNanoTechnology
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2010-08-12