Evaporation based micro pump integrated into a scanning force microscope probe

A micro pump was integrated into a scanning force microscope probe for circulating liquid through its hollow cantilever and tip. The interior cross section of the cantilever was 2.25 mu m x 3.75 mu m. All fluidic parts were made of SiO2, while the tip apex was made of Si3N4. The key fabrication techniques were silicon wafer bonding and wet-oxidation. The pumping mechanism was relying on the enhanced evaporation at an enlarged water/air interface at the exit of the microchannel. Capillary forces continuously wetted this interfacial area, thus drawing the liquid through the system. At room temperature, a pump rate of 11 pl s(-1) was experimentally evaluated. The observed temperature dependence of the pump rate could be qualitatively understood by a plain model calculation. (C) 2007 Elsevier B.V. All rights reserved.


Published in:
Microelectronic Engineering, 85, 1302-1305
Presented at:
Proceedings of the Conference on Micro- and Nano-Engineering, MNE 2007, Copenhagen, Denmark, September 23-26, 2007
Year:
2008
Publisher:
Elsevier
ISSN:
0167-9317
Keywords:
Laboratories:




 Record created 2010-04-07, last modified 2018-03-17


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