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conference paper
Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection
2008
Proceedings of the Conference Phd Research In Microelectronics And Electronics
This paper describes the fabrication technique for the realization a microfluidic flow cell to be integrated on a CMOS biosensor for DNA hybridization detection. The main element of the microfluidic system is made in polydimethylsiloxane (PDMS) elastomer and takes up an area of 5 mm(2). PDMS is cast against a silicon master patterned by Deep Reactive Ion Etching (DRIE) and then bonded on the chip by means of oxygen plasma activation. The micro channels patterned in the flow cell are connected with capillary tubes that can be easily interconnected to a common syringe.
Type
conference paper
Authors
Caboni, Alessandra
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Barbaro, Massimo
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•
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Linder, Vincent
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Publication date
2008
Published in
Proceedings of the Conference Phd Research In Microelectronics And Electronics
Start page
121
End page
124
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Istanbul, TURKEY | June 22-25, 2008 | |
Available on Infoscience
April 7, 2010
Use this identifier to reference this record