Dynamic array spot shaping for laser micro machining
2009
Details
Title
Dynamic array spot shaping for laser micro machining
Author(s)
Bich, A. ; Weible, K. J. ; Voelkel, R. ; Zimmermann, M. ; Harder, I. ; Lindlein, N. ; Masson, J. ; Bitterli, R. ; Noell, W. ; Scharf, T.
Published in
Proceedings of the SPIE
Volume
7430
Pages
74300I-74300I-11
Conference
Laser Beam Shaping X, San Diego, August 02-06, 2009
Date
2009
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2010-02-11