6Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping
2009
Details
Title
6Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping
Author(s)
Masson, J. ; Bich, A. ; Noell, W. ; Voelkel, R. ; Weible, K. J. ; de Rooij, N. F.
Published in
Proceedings of the SPIE
Volume
7430
Pages
74300H-74300H-8
Conference
Laser Beam Shaping X, San Diego, August 02-06, 2009
Date
2009
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2010-02-11