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research article

Digital holographic reflectometry

Colomb, Tristan  
•
Krivec, Stefan
•
Hutter, Herbert
Show more
2010
Optics Express

Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wavefront (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro- structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO2/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.

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Type
research article
DOI
10.1364/OE.18.003719
Web of Science ID

WOS:000274795700054

Author(s)
Colomb, Tristan  
Krivec, Stefan
Hutter, Herbert
Akatay, Ahmet Ata  
Pavillon, Nicolas  
Kühn, Jonas
Depeursinge, Christian  
Emery, Yves
Date Issued

2010

Published in
Optics Express
Volume

18

Issue

4

Start page

3719

End page

3731

Subjects

Digital holography

•

Densitometers, reflectometers

•

Reflection

•

[MVD]

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LOA  
Available on Infoscience
February 2, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/46372
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