Epitaxial Thin Films on Silicon for MEMS devices
2009
Details
Title
Epitaxial Thin Films on Silicon for MEMS devices
Author(s)
Sambri, A. ; Gariglio, S. ; Triscone, J.M. ; Isarakorn, D. ; Briand, D. ; de Rooij, N.F.
Conference
1st National Congress on Functional Oxide for Electronics - FOxE, Sorrento, March 25-27, 2009
Date
2009
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2010-01-25