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Characterization of small size microlenses by high resolution interference immersion microscopy

Scharf, Toralf ; Kim, M.-S. ; Herzig, Hans Peter

Presented at:
15th Microoptics Conference (MOC 09), Tokyo, October 25-28 2009
Year:
2009
Laboratories:
OPT

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > OPT - Optics and Photonics Technology Laboratory
Presentations & Talks
Work produced at EPFL
Published



 Record created 2010-01-22, last modified 2018-03-17


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