Flexible Membranes Improve Resolution in Stencil Lithography


Published in:
The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication
Presented at:
The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication , Anchorage, Alaska, U.S.A., June 1- 4, 2010
Year:
2010
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2010-01-20, last modified 2018-03-18

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