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research article
Oxide–nitride–oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis
2007
Type
research article
Authors
Ioannou-Sougleridis, V
•
Dimitrakis, P
•
Em Vamvakas, V
•
Normand, Pascal
•
Bonafos, Caroline
•
Schamm, Sylvie
•
•
Ben Assayag, Gerard
•
Paillard, Vincent
Publication date
2007
Published in
Volume
18
Issue
21
Article Number
215204
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
November 9, 2009
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