Infoscience

Journal article

Oxide–nitride–oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis

Ioannou-Sougleridis, V; Dimitrakis, P; Em Vamvakas, V; Normand, Pascal; Bonafos, Caroline; Schamm, Sylvie; Mouti, Anas; Ben Assayag, Gerard; Paillard, Vincent
  • Published in: Nanotechnology, vol. 18, num. 21
  • Publication date: 2007

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