Oxide–nitride–oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis
Ioannou-Sougleridis, V; Dimitrakis, P; Em Vamvakas, V; Normand, Pascal; Bonafos, Caroline; Schamm, Sylvie; Mouti, Anas; Ben Assayag, Gerard; Paillard, Vincent
2007

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Title Oxide–nitride–oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis
Author(s) Ioannou-Sougleridis, V ; Dimitrakis, P ; Em Vamvakas, V ; Normand, Pascal ; Bonafos, Caroline ; Schamm, Sylvie ; Mouti, Anas ; Ben Assayag, Gerard ; Paillard, Vincent
Published in Nanotechnology
Volume 18
Issue 21
Date 2007
DOI 10.1088/0957-4484/18/21/215204
Laboratories CIME
Record Appears in Scientific production and competences > SB - School of Basic Sciences > CIME - Interdisciplinary Center for Electron Microscopy
Peer-reviewed publications
Work produced at EPFL
Journal Articles
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