Oxide–nitride–oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis
2007
Details
Title
Oxide–nitride–oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis
Author(s)
Ioannou-Sougleridis, V ; Dimitrakis, P ; Em Vamvakas, V ; Normand, Pascal ; Bonafos, Caroline ; Schamm, Sylvie ; Mouti, Anas ; Ben Assayag, Gerard ; Paillard, Vincent
Published in
Nanotechnology
Volume
18
Issue
21
Date
2007
Laboratories
CIME