Microhotplates with TiN heaters
2008
Details
Title
Microhotplates with TiN heaters
Author(s)
Creemer, J.F. ; Briand, D. ; Zandbergen, H.W. ; van der Vlist, W. ; de Boer, C.R. ; de Rooij, N.F. ; Sarro, P.M.
Published in
Sensors and Actuators A
Volume
148
Pages
416-421
Date
2008
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2009-11-09