Organic Thin Film Transistors on Flexible Polyimide Substrates Fabricated by Full Wafer Stencil Lithography

This paper presents new results on miniaturized organic thin film transistors (TFT) fabricated on a spin coated polyimide (PI) film. Patterning steps, that are vital for the integrity and electrical performances of the organic TFT, were performed using resistless shadow-mask lithography with two high precision MEMS fabricated stencils, thus avoiding solvents and high temperature processes. Both pentacene and source-drain (S/D) electrodes were directly patterned through stencils with high accuracy on wafer scale. The TFT have been characterized before and after peeling the flexible PI film off the rigid surface, showing full transistor functionality in both cases.


Published in:
Proceedings of the Eurosensors XXIII conference
Presented at:
XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.
Year:
2009
Publisher:
Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2009-11-06, last modified 2018-03-17

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