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research article
Atomic structure at the Si(001)-SiO2 interface: from the interpretation of Si 2p core-level shifts to a model structure
After assessing the current status concerning the interpretation of Si 2p core-level shifts in Si-O systems, we model the atomic structure of the Si(001)-SiO2 interface using recent photoemission data obtained with synchrotron radiation. Our model structure reproduces the amount, the distribution, and the location of silicon atoms in intermediate states of oxidation. Our model also shows a SiO2 density in the neighborhood of the interface consistent with X-ray reflectivity measurements. (C) 2002 Elsevier Science B.V. All rights reserved.
Type
research article
Web of Science ID
WOS:000178888600008
Authors
Publication date
2002
Volume
96
Issue
2
Start page
102
End page
106
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 8, 2009
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