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Abstract

Reliable operation in harsh environments such as high temperatures, high pressures, aggressive media and space, poses special requirements for sensors and packages, which usually cannot be met using polymer-based technologies. Ceramic technologies, especially LTCC (Low-Temperature Cofired Ceramic), offer a reliable platform to build hermetic, highly stable and reliable sensors and packages. This is illustrated in the present work through several such devices. The examples are discussed in terms of performance, reliability, manufacturability and cost issues.

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