Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Hermetic package for optical MEMS
 
research article

Hermetic package for optical MEMS

Seigneur, Frank
•
Fournier, Yannick  
•
Maeder, Thomas  
Show more
2009
Journal of Microelectronics and Electronic Packaging

This article describes the design and fabrication of a hermetic LTCC package for an optical MEMS chip designed for space applications. The package must ensure electrical and optical connections, mechanical positioning, atmosphere control, and finally low thermally induced stress on the MEMS during final packaging operation. The package consists of a 10-layer LTCC case with a recessed cavity for the MEMS chip, and glass lid (with antireflection coating and thin-film metallisation for soldering) for optical I/O. The chip is mechanically attached to the bottom of the cavity with a silicone adhesive, and electrically connected through gold wire bonds. The gold wire bonding pads are routed through the LTCC module to a MegArray BGA connector. Hermetic closure of the cavity is carried out by soldering the glass lid onto the case in a controlled atmosphere. The two main difficulties involved in such a package are the high electrical connection density (400 connections) and low-temperature hermetic sealing. LTCC design rules for small-pitch lines, thick- and thin-film materials selection, screen-printing, lamination techniques and soldering methods are described in this article.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

2009 Seigneur packaging hermétique LTCC pour MEMS optique - 09JMEPq1_6.pdf

Type

Publisher's Version

Version

http://purl.org/coar/version/c_970fb48d4fbd8a85

Access type

restricted

Size

2.8 MB

Format

Adobe PDF

Checksum (MD5)

88113a3d063a07f47fd7e16e48f7bb07

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés