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  4. Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy
 
conference paper

Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy

Kühn, Jonas
•
Charrière, Florian  
•
Colomb, Tristan  
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2008
Optical Micro- and Nanometrology in Microsystems Technology II
Photonics Europe

We present dual-wavelength Digital Holographic Microscopy (DHM) measurements on a certified 8.9 nm high Chromium thin step sample and demonstrate sub-nanometer axial accuracy. We introduce a modified DHM Reference Calibrated Hologram (RCH) reconstruction algorithm taking into account amplitude contributions. By combining this with a temporal averaging procedure and a specific dual-wavelength DHM arrangement, it is shown that specimen topography can be measured with an accuracy, defined as the axial standard deviation, reduced to at least 0.9 nm. Indeed, it is reported that averaging each of the two wavefronts recorded with real-time dual-wavelength DHM can provide up to 30% spatial noise reduction for the given configuration, thanks to their non-correlated nature.

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Type
conference paper
DOI
10.1117/12.781263
Web of Science ID

WOS:000257885600002

Author(s)
Kühn, Jonas
Charrière, Florian  
Colomb, Tristan  
Montfort, Frédéric  
Cuche, Etienne  
Emery, Yves
Marquet, Pierre
Depeursinge, Christian  
Date Issued

2008

Publisher

SPIE

Published in
Optical Micro- and Nanometrology in Microsystems Technology II
Volume

6995

Subjects

[MVD]

URL

URL

http://spie.org/x648.html?product_id=781263
Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LOA  
Event nameEvent placeEvent date
Photonics Europe

Strasbourg

April 7-11, 2008

Available on Infoscience
August 2, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41964
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