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Various top-down, bottom-up and hybrid fabrication routes of discontinuous palladium nano and mesostructures can be used for the fabrication of resistor based H2 sensing devices. 1-D, 2D, and 3-D structures can be achieved using appropriate material templating and self-organization methods. Sensing mechanism is based on reversible gap closing/opening under H2/H2-free atmospheres undergoing the conversion equilibrium between Pd and PdH0.7. Sensing performances depend on device designs and material microstructures and assembling/organizations.