Infoscience

Patent

Gasphasenabscheidung von perfluorierten Alkylsilanen

    Keywords: [NRG]

    Note:

    German patent application

    Reference

    • LOA-PATENT-2002-002

    Record created on 2009-07-20, modified on 2016-08-08

Fulltext

  • There is no available fulltext. Please contact the lab or the authors.

Related material