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conference paper
Selective area deposition of titanium dioxide thin films at low temperature by Light Induced Chemical Vapour Deposition
2002
Bulletin SPG / SSP
Type
conference paper
Authors
Publication date
2002
Published in
Bulletin SPG / SSP
Volume
19
Subjects
EPFL units
Available on Infoscience
July 20, 2009
Use this identifier to reference this record