Infoscience

Conference paper

High uniformity deposition with chemical beams in high vacuum

Benvenuti, G.; Halary-Wagner, E.; Brioude, A.; Hoffmann, P.
  • Published in: EMRS
  • Publication date: 2002

Fulltext

  • There is no available fulltext. Please contact the lab or the authors.

Related material

Contacts

EPFL authors