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High uniformity deposition with chemical beams in high vacuum

Benvenuti, G. ; Halary-Wagner, E. ; Brioude, A. ; Hoffmann, P.

Published in:
EMRS
Year:
2002
Keywords:
[NRG]
Other identifiers:
DAR: 3687
View record in Web of Science
Laboratories:
LOA

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
Published



 Record created 2009-07-20, last modified 2018-09-13


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