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  4. High uniformity deposition with chemical beams in high vacuum
 
conference paper

High uniformity deposition with chemical beams in high vacuum

Benvenuti, G.  
•
Halary-Wagner, E.
•
Brioude, A.  
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2002
EMRS
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Type
conference paper
Web of Science ID

WOS:000182573200081

Author(s)
Benvenuti, G.  
Halary-Wagner, E.
Brioude, A.  
Hoffmann, P.  
Date Issued

2002

Published in
EMRS
Subjects

[NRG]

Written at

EPFL

EPFL units
LOA  
Available on Infoscience
July 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41724
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