Loading...
research article
Static vapor pressure measurements of low volatile precursors for Molecular Vapor Deposition below ambient temperature
Type
research article
Authors
Publication date
2001
Published in
Volume
7
Issue
1
Start page
33
End page
37
Subjects
Note
\Atlantis\MAD\MAD public\Publi Present Conferences\Publications\printed papers\2001 : NRG Ohta 2001 115
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
July 20, 2009
Use this identifier to reference this record