conference paper
Effect of Beam Parameters in Electron Beam Induced Deposition of Rhodium from a Carbon Free Precursor: A Systematic Study
2000
AVS 47th International Symposium Processing at the Nanoscale
Type
conference paper
Author(s)
Date Issued
2000
Published in
AVS 47th International Symposium Processing at the Nanoscale
Subjects
Written at
EPFL
EPFL units
Available on Infoscience
July 20, 2009
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