Effect of Beam Parameters in Electron Beam Induced Deposition of Rhodium from a Carbon Free Precursor: A Systematic Study
2000
Details
Title
Effect of Beam Parameters in Electron Beam Induced Deposition of Rhodium from a Carbon Free Precursor: A Systematic Study
Author(s)
Cicoira, F. ; Utke, I. ; Hoffmann, P. ; Dwir, B. ; Leifer, K. ; Kapon, E. ; Laub, D. ; Mathieu, H. J. ; Doppelt, P.
Published in
AVS 47th International Symposium Processing at the Nanoscale
Date
2000
Keywords
Laboratories
LOA
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LOA - Advanced Photonics Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-07-20