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conference paper
Effect of Beam Parameters in Electron Beam Induced Deposition of Rhodium from a Carbon Free Precursor: A Systematic Study
2000
AVS 47th International Symposium Processing at the Nanoscale
Type
conference paper
Authors
Cicoira, F.
•
Utke, I.
•
•
Dwir, B.
•
Leifer, K.
•
Kapon, E.
•
Laub, D.
•
Mathieu, H. J.
•
Doppelt, P.
Publication date
2000
Published in
AVS 47th International Symposium Processing at the Nanoscale
Subjects
EPFL units
Available on Infoscience
July 20, 2009
Use this identifier to reference this record