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  4. Measurements of corner cubes microstructures by high-magnification digital holographic microscopy
 
conference paper

Measurements of corner cubes microstructures by high-magnification digital holographic microscopy

Kühn, J.
•
Cuche, E.  
•
Emery, Y.
Show more
2006
Optical Micro- and Nanometrology in Microsystems Technology
Photonics Europe

This paper presents Digital Holographic Microscopy (DHM) quantitative measurements of transparent high aspect-ratio microstructures. Our experiment was performed using a digital holographic microscope in transmission configuration with a 60x magnification 1.3 NA oil immersion microscope objective, with a diode laser source at 664 nm. We used a calculation model based on the use of two immersion liquids for the experiment, the first one to resolve the phase jumps by using a refractive index liquid close to the sample index, in combination with a second one to retrieve the sample topology from the optical path length information. Such a model makes absolute topographic measurements of high aspect ratio transparent samples achievable by DHM. The model is then applied to measure 25 and 50 mu m transparent micro-corner cubes arrays, which exhibit up to 1: 1,4 aspect ratio with theoretical slopes up to about 55 degrees. Thanks to our phase measurement precision down to P, we found possible to measure accurately the slopes of each face of the microstructures under investigation, and this with a good theoretical agreement.

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Type
conference paper
DOI
10.1117/12.662030
Web of Science ID

WOS:000238886600008

Author(s)
Kühn, J.
Cuche, E.  
Emery, Y.
Colomb, T.  
Charrière, F.  
Montfort, F.  
Botkine, M.
Aspert, N.
Depeursinge, C.  
Date Issued

2006

Publisher

SPIE

Published in
Optical Micro- and Nanometrology in Microsystems Technology
ISBN of the book

0-8194-6244-6

Volume

6188

Start page

18804

End page

18804

Subjects

[MVD]

•

microscopy

•

digital holography

•

high aspect-ratio

•

transparent

•

microstructures

•

corner cube

•

metrology

•

SCANNING-ELECTRON-MICROSCOPY

•

LIVING CELLS

•

CONTRAST

•

LITHOGRAPHY

•

MORPHOMETRY

URL

URL

http://spie.org/x648.html?product_id=662030
Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LOA  
Event nameEvent placeEvent date
Photonics Europe

Strasbourg

April 3-7, 2006

Available on Infoscience
July 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41616
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