Loading...
conference paper
Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS
2006
Mems, Moems, and Micromachining II
Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micromirror. This enables the definition of the linear, non-linear, and modal resonance zones of its dynamical response.
Type
conference paper
Authors
Emery, Y.
•
•
Marquet, F.
•
Aspert, N.
•
Marquet, P.
•
Kühn, J.
•
Botkine, M.
•
•
•
Publication date
2006
Publisher
Published in
Mems, Moems, and Micromachining II
ISBN of the book
0-8194-6242-X
Volume
6186
Start page
N1860
End page
N1860
Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
Event name | Event place | Event date |
Strasbourg | April 3-7, 2006 | |
Available on Infoscience
July 20, 2009
Use this identifier to reference this record