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conference paper
Digital Holographic Microscopy (DHM) applied to optical metrology: A resolution enhanced imaging technology applied to inspection of microscopic devices with subwavelength resolution
2006
Fringe 2005
Type
conference paper
Web of Science ID
WOS:000233295500041
Authors
Publication date
2006
Publisher
Published in
Fringe 2005
ISBN of the book
3-540-26037-4
Publisher place
Berlin
Start page
308
End page
314
Peer reviewed
NON-REVIEWED
EPFL units
| Event name | Event place | Event date |
Stuttgart | November 28-2, 2005 | |
Available on Infoscience
July 20, 2009
Use this identifier to reference this record