Digital Holographic Microscopy (DHM) applied to optical metrology: A resolution enhanced imaging technology applied to inspection of microscopic devices with subwavelength resolution


Published in:
Fringe 2005, 308-314
Presented at:
The 5th International Workshop on Automatic Processing of Finge Patterns, Stuttgart, November 28-2, 2005
Year:
2006
Publisher:
Springer-Verlag Berlin
ISBN:
3-540-26037-4
Keywords:
Laboratories:




 Record created 2009-07-20, last modified 2018-03-17


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