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  4. Digital Holographic Microscopy applied to Metrology
 
conference paper

Digital Holographic Microscopy applied to Metrology

Depeursinge, C. D.  
•
Charrière, F.  
•
Marian, A. M.
Show more
2004
Optical Metrology in Production Engineering
Optical Metrology

We report on a method called Digital Holographic Microscopy (DHM) for the numerical reconstruction of digital holograms taken with a microscope. It allows for simultaneous amplitude and quantitative phase contrast imaging. The reconstruction method computes the propagation of the complex optical wavefront diffracted by the object and is used to determine the refractive index and/or shape of the object with an accuracy in the nanometer range along the optical axis. A single hologram is needed for reconstruction. The method requires the adjustment of several reconstruction parameters. The adjustment is performed automatically by using a suitable algorithm. The method has been applied to the measurement of several integrated optics devices, MOEMS, and integrated micro-optical components: microlenses.

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Type
conference paper
DOI
10.1117/12.546014
Web of Science ID

WOS:000224432300055

Author(s)
Depeursinge, C. D.  
Charrière, F.  
Marian, A. M.
Montfort, F.  
Colomb, T. B.  
Kühn, J.
Cuche, E.  
Emery, Y.
Marquet, P.
Magistretti, P. J.
Date Issued

2004

Publisher

SPIE

Published in
Optical Metrology in Production Engineering
ISBN of the book

0-8194-5379-X

Volume

5457

Start page

504

End page

512

Subjects

[MVD]

•

microscopy

•

holography

•

phase contrast

•

surface metrology

•

NUMERICAL RECONSTRUCTION

•

CONTRAST

URL

URL

http://spie.org/x648.html?product_id=546014
Written at

EPFL

EPFL units
LOA  
Event name
Optical Metrology
Available on Infoscience
July 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41547
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