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book part or chapter
Piezoelectric Films for Innovations in the Field of MEMS and Biosensors
Type
book part or chapter
Authors
Editors
Heywang, W.
•
Lubitz, K.
•
Wersing, W.
Publication date
2008
Publisher
Published in
Piezoelectricity: Evolution and Future of a Technology
Publisher place
Berlin
Start page
351
End page
376
Series title/Series vol.
Springer Series in Materials Science; 114
EPFL units
Available on Infoscience
June 25, 2009
Use this identifier to reference this record