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conference paper
Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS
2008
34th International Conference on Micro and Nano Engineering (MNE'2008)
Type
conference paper
Authors
Martin, Cristina
•
Ingrosso, Chiara
•
Llobera, Andreu
•
Perez-Murano, Francesc
•
Sangregorio, Claudio
•
•
Striccoli, Marinella
•
Agostiano, Angela
•
Curri, M. Lucia
Publication date
2008
Published in
34th International Conference on Micro and Nano Engineering (MNE'2008)
URL
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Athens, Greece | September 15-18, 2008 | |
Available on Infoscience
June 3, 2009
Use this identifier to reference this record