Influence of temperature on metal to glass anodic bonding
2002
Details
Title
Influence of temperature on metal to glass anodic bonding
Author(s)
Weber, P. ; Briand, D. ; de Rooij, N. F.
Published in
Workshop on wafer bonding
Date
2002
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12